A DUAL GRATING ALIGNMENT TECHNIQUE FOR X-RAY-LITHOGRAPHY

[1] DEGUCHI K, 1982, B JPN SOC PREC ENG, V16, P199

[2] FAY B, 1979, J VAC SCI TECHNOL, V16, P1954, DOI 10.1116/1.570364

[3] HAYASAKA T, 1983, 10TH P INT C EL ION, P347

[4] KERN DP, 1981, 9TH P S EL ION BEAM, P491

[5] EXPERIMENTAL EVALUATION OF INTERFEROMETRIC ALIGNMENT TECHNIQUES FOR MULTIPLE MASK REGISTRATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1214 - 1218

[6] THEORY OF ALIGNMENT MONITORING BY DIFFRACTION FROM SUPERIMPOSED DUAL GRATINGS [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1978, 68 (12) : 1716 - 1731

[1] DEGUCHI K, 1982, B JPN SOC PREC ENG, V16, P199

[2] FAY B, 1979, J VAC SCI TECHNOL, V16, P1954, DOI 10.1116/1.570364

[3] HAYASAKA T, 1983, 10TH P INT C EL ION, P347

[4] KERN DP, 1981, 9TH P S EL ION BEAM, P491

[5] EXPERIMENTAL EVALUATION OF INTERFEROMETRIC ALIGNMENT TECHNIQUES FOR MULTIPLE MASK REGISTRATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1214 - 1218

[6] THEORY OF ALIGNMENT MONITORING BY DIFFRACTION FROM SUPERIMPOSED DUAL GRATINGS [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1978, 68 (12) : 1716 - 1731