LASER-FOCUSED ATOMIC DEPOSITION

被引:401
作者
MCCLELLAND, JJ
SCHOLTEN, RE
PALM, EC
CELOTTA, RJ
机构
[1] Electron Physics Group, National Institute of Standards and Technology, Gaithersburg
关键词
D O I
10.1126/science.262.5135.877
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The ability to fabricate nanometer-sized structures that are stable in air has the potential to contribute significantly to the advancement of new nanotechnologies and our understanding of nanoscale systems. Laser light can be used to control the motion of atoms on a nanoscopic scale. Chromium atoms were focused by a standing-wave laser field as they deposited onto a silicon substrate. The resulting nanostructure consisted of a series of narrow lines covering 0.4 millimeter by 1 millimeter. Atomic force microscopy measurements showed a line width of 65 +/- 6 nanometers, a spacing of 212.78 nanometers, and a height of 34 +/- 10 nanometers. The observed line widths and shapes are compared with the predictions of a semiclassical atom optical model.
引用
收藏
页码:877 / 880
页数:4
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