INVESTIGATION OF ION-BEAM SYNTHESIZED FESI2 AND THE ALPHA-]BETA-PHASE TRANSFORMATION

被引：13

作者：

PANKNIN, D ^{[1
]}

WIESER, E ^{[1
]}

WOLLSCHLAGER, K ^{[1
]}

GROTZSCHEL, R ^{[1
]}

SKORUPA, W ^{[1
]}

QUERNER, G ^{[1
]}

机构：

[1] TECH UNIV DRESDEN,O-8027 DRESDEN,GERMANY

来源：

VACUUM | 1993年 / 44卷 / 3-4期

关键词：

D O I：

10.1016/0042-207X(93)90148-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A buried layer of iron silicide was formed by high-dose implantation of Fe into (100) silicon and subsequent annealing. The transformation of FeSi2 from the beta-phase to the alpha-phase and vice versa due to annealing above or below the transition temperature of 967-degrees-C has been studied by RBS, X-ray diffraction, infra-red spectroscopy and resistivity measurements. The corresponding change in the iron distribution due to the phase transformation is discussed. Beside the main component FeSi2, an admixture of FeSi is observed in the as-implanted state for doses >4 x 10(17) Fe CM-2. The FeSi vanishes during the annealing treatment.

引用

页码：171 / 174

页数：4

共 6 条

[1] TRANSFORMATION MECHANISMS OF ALPHA REVERSIBLE BETA TRANSITION IN FESI2 [J].

LECORRE, C ;

GENIN, JM .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1972, 51 (01) :K85-&

[2]

MULLER G, 1990, NUCL INSTRUM METH B, V50, P348

[3] ION-BEAM SYNTHESIS OF BURIED FESI2 IN (100) SILICON [J].

PANKNIN, D ;

WIESER, E ;

GROETZSCHEL, R ;

SKORUPA, W ;

BAITHER, D ;

BARTSCH, H ;

QUERNER, G ;

DANZIG, A .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 12 (1-2) :119-122

[4]

PETUKHOV VY, 1986, PHYS STATUS SOLIDI A, V96, P463, DOI 10.1002/pssa.2210960211

[5] ION-BEAM SYNTHESIS OF BURIED ALPHA-FESI2 AND BETA-FESI2 LAYERS [J].

RADERMACHER, K ;

MANTL, S ;

DIEKER, C ;

LUTH, H .

APPLIED PHYSICS LETTERS, 1991, 59 (17) :2145-2147

[6]

REUTHER H, 1992, NUCL INSTRUM METH B, V68, P247

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