SYNTHESIS OF CARBON NITRIDE FILMS BY MAGNETICALLY ROTATED ARC-PLASMA JET CHEMICAL-VAPOR-DEPOSITION

被引：67

作者：

YEN, TY

CHOU, CP

机构：

[1] Department of Mechanical Engineering, National Chiao Tung University, Hsinchu

来源：

SOLID STATE COMMUNICATIONS | 1995年 / 95卷 / 05期

关键词：

THIN FILMS; CHEMICAL SYNTHESIS; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY; INELASTIC LIGHT SCATTERING;

D O I：

10.1016/0038-1098(95)00275-8

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Carbon Nitride films have been grown on nickel substrates by magnetically rotated arc-plasma jet chemical vapor deposition (CVD). These films were characterized by scanning electron microscopy (SEM), wavelength dispersive X-ray spectrometry (WDS) transmission electron microscopy (TEM), and Raman spectroscopy. Small grains (similar to 0.1 mu m) as well as nanocrystallites found in the films were identified to be beta-C3N4. Raman spectrum also confirmed the existence of beta-C3N4 phase in the films through three pronounced Raman bands at low frequency as expected from the Hooke's law approximation.

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页码：281 / 286

页数：6

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