CHARACTERIZATION AND OPTIMIZATION OF A LASER GENERATED PLASMA SOURCE OF SOFT X-RAYS

被引：1

作者：

ROGOYSKI, AM

CHARALAMBOUS, P

HILLS, CP

MICHETTE, AG

机构：

来源：

关键词：

D O I：

10.1017/S0263034600003979

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：225 / 234

页数：10

共 12 条

[1] INVESTIGATION OF A LASER-PRODUCED PLASMA VUV LIGHT-SOURCE
BRIDGES, JM
CROMER, CL
MCILRATH, TJ
[J]. APPLIED OPTICS, 1986, 25 (13): : 2208 - 2214
[2] A NEW LITHOGRAPHIC TECHNIQUE FOR THE MANUFACTURE OF HIGH-RESOLUTION ZONE PLATES FOR SOFT X-RAYS
BROWNE, MT
CHARALAMBOUS, P
BURGE, RE
DUKE, PJ
MICHETTE, AG
SIMPSON, MJ
[J]. JOURNAL DE PHYSIQUE, 1984, 45 (NC-2): : 89 - 92
[3] PHOTOELECTRIC QUANTUM EFFICIENCIES AND FILTER WINDOW ABSORPTION-COEFFICIENTS FROM 20-EV TO 10-KEV
DAY, RH
LEE, P
SALOMAN, EB
NAGEL, DJ
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) : 6965 - 6973
[4] SOFT-X-RAY AND X-RAY ULTRAVIOLET-RADIATION FROM HIGH-DENSITY ALUMINUM PLASMAS
DUSTON, D
DAVIS, J
[J]. PHYSICAL REVIEW A, 1981, 23 (05): : 2602 - 2621
[5] FEDER R, 1977, SPRINGER VERLAG SERI, V22
[6] LASER-GENERATED PLASMA AS SOFT-X-RAY SOURCE
GERRITSEN, HC
VANBRUG, H
BIJKERK, F
VANDERWIEL, MJ
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (07) : 2337 - 2344
[7] SOFT-X-RAY LITHOGRAPHY USING RADIATION FROM LASER-PRODUCED PLASMAS
GOHIL, P
KAPOOR, H
MA, D
PEKERAR, MC
MCILRATH, TJ
GINTER, ML
[J]. APPLIED OPTICS, 1985, 24 (13): : 2024 - 2027
[8] GOHIL P, 1986, APPL OPTICS, V13, P2039
[9] KOMADA R, 1986, J APPL PHYS, V59, P3050
[10] SOFT-X-RAY CONTACT MICROSCOPY USING LASER PLASMA SOURCES
MICHETTE, AG
CHENG, PC
EASON, RW
FEDER, R
ONEILL, F
OWADANO, Y
ROSSER, RJ
RUMSBY, P
SHAW, MJ
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1986, 19 (03) : 363 - &