GALLIUM-ARSENIDE AS A MECHANICAL MATERIAL

被引：103

作者：

HJORT, K

SODERKVIST, J

SCHWEITZ, JA

机构：

[1] Inst. of Technol., Uppsala Univ.

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1994年 / 4卷 / 01期

关键词：

D O I：

10.1088/0960-1317/4/1/001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The aim of this work is to introduce GaAs as a mechanical material to those working primarily with silicon in micromechanics, and to give an update of the micromechanical properties of GaAs. Mechanical properties, some promising response mechanisms for micromechanical sensors, and recent micromechanical applications are reviewed for GaAs, and its best developed alloying system, the AlxGa1-xAs ternary.

引用

页码：1 / 13

页数：13

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[1] LATTICE THERMAL RESISTIVITY OF III-V COMPOUND ALLOYS [J].