CHARACTERIZATION OF COMPOSITE CARBON COATINGS DEPOSITED BY DC CATHODIC ARC TECHNIQUE

被引:29
作者
ROTHER, B [1 ]
SIEGEL, J [1 ]
BREUER, K [1 ]
MUHLING, I [1 ]
DEUTSCHMANN, S [1 ]
VETTER, J [1 ]
TROMMER, G [1 ]
RAU, B [1 ]
HEISER, C [1 ]
机构
[1] ACAD SCI GDR,ZENT INST KERNFORSCH,O-8051 DRESDEN,GERMANY
关键词
D O I
10.1557/JMR.1991.0101
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Carbon films deposited by a modified dc cathodic arc technique were characterized by several analytical methods. The coatings consist of two constituents originating from process characteristics of the technique applied. Small fragments of graphite are embedded in a matrix material of an amorphous structure with diamond-like short-range order. The coatings exhibit friction and wear reducing properties.
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页码:101 / 111
页数:11
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