ELECTRON-GUN FOR PRODUCING A LOW-ENERGY, HIGH-CURRENT, AND UNIFORM FLUX ELECTRON-BEAM

被引:17
作者
LIN, JL
YATES, JT
机构
[1] Surface Science Center, Department of chemistry, University of Pittsburgh, Pittsburgh, Pennsylvania
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 05期
关键词
D O I
10.1116/1.578976
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A low energy electron gun to provide a uniform electron flux at an extended target surface has been designed, built, and tested. The simple and unique configuration of the electron gun combined with its low energy, high current, and uniform electron flux properties make it suitable for electron-stimulated desorption studies on extended surfaces requiring uniform bombardment over centimeter dimensions.
引用
收藏
页码:2795 / 2797
页数:3
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