A NOVEL COPPER COMPLEX AND CVD PRECURSOR - (ETA-2-2-BUTYNE)COPPER(I) HEXAFLUOROACETYLACETONATE

The synthesis of (eta(2)-2-butyne)copper(I) hexafluoroacetylacetonate was achieved in one step and in good yield. X-ray crystallographic examination revealed two structurally similar, nearly planar molecules within the monoclinic crystal. The 2-butyne ligand is eta(2) bonded, parallel to the Cu beta-diketonate plane, the methyl groups are cis bent away from copper (theta(CCMe) = 163-degrees) with a small angle of deformation from linear and the C = C bond distance averages 1.210 angstrom. All of the data indicate pi-electron donation from the butyne ligand to the copper(I) center and minimal pi-back-bonding to the alkyne. This previously unreported complex is a volatile yellow solid which undergoes pyrolytic decomposition to copper metal. Chemical vapor deposition of high-purity copper films with rapid rates of deposition and good conformality were observed upon pyrolytic decomposition from this complex.