LASER-INDUCED PHASE-TRANSFORMATION FROM AMORPHOUS TO PEROVSKITE IN PBZR0.44TI0.56O3 FILMS WITH THE SUBSTRATE AT ROOM-TEMPERATURE

Radio-frequency-sputtered amorphous as-grown PbZr0.44Ti0.56O3 (PZT) thin films were prepared on glass substrates from a PZT ceramic target with excess PbO. They were subsequently treated with a laser-induced phase transformation technique to achieve a pure perovskite structure. The optimal conditions for the process were determined. During the whole fabrication process, the substrate was kept at room temperature. This technique was also compared with traditional oven and rapid thermal processing after-deposition treatments. (C) 1994 American Institute of Physics.