X-RAY-SCATTERING STUDIES OF SURFACE-ROUGHNESS OF GAAS/ALAS MULTILAYERS

被引：91

作者：

SINHA, SK

SANYAL, MK

SATIJA, SK

MAJKRZAK, CF

NEUMANN, DA

HOMMA, H

SZPALA, S

GIBAUD, A

MORKOC, H

机构：

[1] BHABHA ATOM RES CTR,BOMBAY 40000885,INDIA

[2] NATL INST STAND & TECHNOL,GAITHERSBURG,MD 20899

[3] UNIV ILLINOIS,URBANA,IL 61801

[4] CUNY BROOKLYN COLL,BROOKLYN,NY 11210

[5] UNIV MAINE,F-72017 LE MANS,FRANCE

来源：

PHYSICA B | 1994年 / 198卷 / 1-3期

关键词：

D O I：

10.1016/0921-4526(94)90131-7

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We discuss the theory of X-ray scattering from multilayers with conformal roughness of the interfaces, and illustrate with an analysis of specular, diffuse and wide-angle scattering from a GaAs/AlAs multilayer. This is a highly coherent multilayer structure deposited on a stepped, but otherwise smooth surface. The roughness due to the steps propagates through the layers and a distinct anisotropy is observed in the diffuse scattering. We discuss a method to treat diffuse scattering from such surfaces with slightly irregular steps.

引用

页码：72 / 77

页数：6

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