PARTICLE-EMISSION FROM SI3N4 SURFACE BY EXCIMER-LASER RADIATION

被引：9

作者：

AKIBA, T ^{[1
]}

AKIMUNE, Y ^{[1
]}

HIROSAKI, N ^{[1
]}

DICKINSON, JT ^{[1
]}

机构：

[1] WASHINGTON STATE UNIV,DEPT PHYS,PULLMAN,WA 99164

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1995年 / 14卷 / 12期

关键词：

D O I：

10.1007/BF00639319

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：898 / 900

页数：3

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[8] INTERACTIONS OF WIDE BAND-GAP SINGLE-CRYSTALS WITH 248 NM EXCIMER-LASER RADIATION .2. NACL [J].

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