STABLE AND EFFICIENT ELECTROCHEMICAL EVOLUTION OF OXYGEN AND CHLORINE ON NIOBIUM NITRIDE AMORPHOUS THIN-FILMS PREPARED BY THE REACTIVE RF-SPUTTERING TECHNIQUE

被引：6

作者：

AZUMA, M ^{[1
]}

NAKATO, Y ^{[1
]}

TSUBOMURA, H ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN SCI,DEPT CHEM,TOYONAKA,OSAKA 560,JAPAN

来源：

MATERIALS RESEARCH BULLETIN | 1987年 / 22卷 / 04期

关键词：

D O I：

10.1016/0025-5408(87)90264-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：527 / 533

页数：7

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