PLANAR 1/8 SPLITTER IN GLASS BY PHOTORESIST MASKED SILVER FILM ION-EXCHANGE

被引：18

作者：

POYHONEN, P ^{[1
]}

HONKANEN, S ^{[1
]}

TERVONEN, A ^{[1
]}

TAHKOKORPI, M ^{[1
]}

ALBERT, J ^{[1
]}

机构：

[1] COMMUN RES CTR,OTTAWA K2H 8S2,ONTARIO,CANADA

来源：

ELECTRONICS LETTERS | 1991年 / 27卷 / 15期

关键词：

INTEGRATED OPTICS; OPTICAL WAVE-GUIDES;

D O I：

10.1049/el:19910829

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Fabrication of singlemode glass waveguide devices by silver film ion exchange with standard photoresist as a mask for the ion exchange is proposed. The process uses the advantages of the silver film ion exchange and the simple and accurate patterning when photoresist is used directly as a mask. As a component example, a singlemode 1/8 power splitter is fabricated and measured.

引用

页码：1319 / 1320

页数：2

共 8 条

[1] OPTICAL-WAVEGUIDES FABRICATED BY ELECTRIC-FIELD CONTROLLED ION-EXCHANGE IN GLASS [J].