FREESTANDING WHITE DIAMOND FOR THERMAL AND OPTICAL APPLICATIONS

被引：14

作者：

LU, G ^{[1
]}

GRAY, KJ ^{[1
]}

BORCHELT, EF ^{[1
]}

BIGELOW, LK ^{[1
]}

GRAEBNER, JE ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1016/0925-9635(93)90274-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

White chemical-vapor-deposited (CVD) diamond wafers, 10 cm in diameter and up to 1 mm thick, have been deposited in a magnetically-enhanced d.c. arc-jet. Entire wafers or sections of a wafer were finished to a surface roughness R(a) of 0.05-0.2 mum. The thermal conductivity was measured by converging thermal wave, steady state and laser flash methods to be 1350-1400 W m-1 K-1, 1610 W m-1 K-1 and 2170 W m-1 K-1 respectively. The optical transmission of a CVD window 335 mum thick was shown to be identical to natural Ila diamond transmission at wavelengths above the two phonon absorption and slightly lower due to scattering at shorter wavelengths. The hydrogen content was determined to be 20 ppm by comparing the strength of the IR C-H stretch absorption peak with that of paraffin wax. The elastic constants were measured by ultrasonic techniques and shown to be similar to those of natural diamond.

引用

页码：1064 / 1068

页数：5

共 18 条

[1]

Bhardwaj M.C., 1986, ADV CERAM MATER, V1, P311, DOI [10.1111/j.1551-2916.1986.tb00034.x, DOI 10.1111/J.1551-2916.1986.TB00034.X]

[2]

FENG T, 1989, SPIE, V1146, P159

[3]

FIELD JE, 1979, PROPERTIES DIAMOND, P648

[4]

FRITSCH E, 1989, SPIE, V1146, P201

[5] UNUSUALLY HIGH THERMAL-CONDUCTIVITY IN DIAMOND FILMS [J].

GRAEBNER, JE ;

JIN, S ;

KAMMLOTT, GW ;

HERB, JA ;

GARDINIER, CF .

APPLIED PHYSICS LETTERS, 1992, 60 (13) :1576-1578

[6] ANISOTROPIC THERMAL-CONDUCTIVITY IN CHEMICAL VAPOR-DEPOSITION DIAMOND [J].

GRAEBNER, JE ;

JIN, S ;

KAMMLOTT, GW ;

BACON, B ;

SEIBLES, L ;

BANHOLZER, W .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (11) :5353-5356

[7] LARGE ANISOTROPIC THERMAL-CONDUCTIVITY IN SYNTHETIC DIAMOND FILMS [J].

GRAEBNER, JE ;

JIN, S ;

KAMMLOTT, GW ;

HERB, JA ;

GARDINIER, CF .

NATURE, 1992, 359 (6394) :401-403

[8]

GRAEBNER JE, 1992, DIAMOND FILM TECHNOL, V1, P155

[9]

GRAY KJ, 1991, SPIE INT SOC OPTICAL, V1534, P60

[10]

GRAY KJ, 1992, SPIE, V1759, P203

← 1 2 →