PHOTORESPONSE OF POLYCRYSTALLINE ZNO FILMS DEPOSITED BY RF BIAS SPUTTERING

被引:43
作者
ZHANG, DH
BRODIE, DE
机构
[1] Guelph-Waterloo Program for Graduate Work in Physics, University of Waterloo, Waterloo
关键词
PHOTOCONDUCTIVITY; PHOTODESORPTION; SPUTTERING; ZINC OXIDE;
D O I
10.1016/S0040-6090(94)06536-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The photoresponse of polycrystalline ZnO films generally contains both a true photoconductivity and a contribution from surface structural changes which can alter the surface conductance via the chemisorption and photodesorption of an active ambient-gas component. The surface structural changes can increase the conductance by up to seven orders of magnitude for a 500 nm thick sample when illuminated with an intensity of 4 x 10(16) photon cm(-2) s(-1) UV light, but the response times are very slow. Newly prepared samples exhibit a fast response characteristic such as a true photoconductivity, but after exposure to air for several months the slower response dominates. Thus if used as a photoconductor, oxygen adsorption or desorption from the surface of a ZnO film is particularly problematic, but some surface stability can be achieved by adding nitrogen to the surface layers of the ZnO film and these samples exhibit more normal and improved photoconducting behaviour.
引用
收藏
页码:334 / 339
页数:6
相关论文
共 15 条
[1]  
ARIJIS E, 1973, SOLID STATE CHEM, V6, P310
[2]  
EGER D, 1975, RCA REV, V36, P508
[3]   ZINC-OXIDE - AN OUTSTANDING EXAMPLE OF A BINARY COMPOUND SEMICONDUCTOR [J].
HIRSCHWALD, WH .
ACCOUNTS OF CHEMICAL RESEARCH, 1985, 18 (08) :228-234
[4]   INTERACTION OF ZNO SURFACES WITH OXYGEN AFTER ILLUMINATION IN PRESENCE OF CO AND O2 [J].
LAGOWSKI, J ;
GATOS, HC ;
HOLMSTROM, R ;
BALESTRA, CL .
SURFACE SCIENCE, 1978, 76 (02) :L575-L579
[5]  
MANY A, 1974, CRC CRIT R SOLID ST, P515
[6]  
MILLER PH, 1956, 1954 PHOT C, P287
[7]  
MOLLWO E, 1956, 1954 PHOT C, P509
[8]   CHEMICAL-DEPOSITION OF ZNO FILMS [J].
RISTOV, M ;
SINADINOVSKI, GJ ;
GROZDANOV, I ;
MITRESKI, M .
THIN SOLID FILMS, 1987, 149 (01) :65-71
[9]   RELATIONSHIP BETWEEN PHOTODESORPTION AND SURFACE CONDUCTIVITY IN ZNO [J].
SHAPIRA, Y ;
MCQUISTAN, RB ;
LICHTMAN, D .
PHYSICAL REVIEW B, 1977, 15 (04) :2163-2169
[10]   CHEMISORPTION, PHOTODESORPTION AND CONDUCTIVITY MEASUREMENTS ON ZNO SURFACES [J].
SHAPIRA, Y ;
COX, SM ;
LICHTMAN, D .
SURFACE SCIENCE, 1976, 54 (01) :43-59