INTERDIFFUSION PROBLEMS AT CDTE/INSB HETEROINTERFACES GROWN BY TEMPERATURE-GRADIENT VAPOR TRANSPORT DEPOSITION

被引:35
作者
KIM, TW
JUNG, M
PARK, HL
NA, HK
KIM, JS
机构
[1] YONSEI UNIV,DEPT PHYS,SEOUL 120749,SOUTH KOREA
[2] KOREA BASIC SCI CTR,DIV INSTRUMENT,SEOUL,SOUTH KOREA
[3] SAMSUNG ELECTR,DIV MEMORY,SUWON,SOUTH KOREA
[4] EWHA WOMANS UNIV,DEPT PHYS,SEOUL 120750,SOUTH KOREA
关键词
D O I
10.1063/1.107681
中图分类号
O59 [应用物理学];
学科分类号
摘要
CdTe epitaxial films were grown by a simple method of temperature gradient vapor transport deposition on p-InSb (111) orientation substrates in the growth temperature range between 200 and 280-degrees-C. Raman spectroscopy showed the optical phonon modes of the CdTe thin films and the formation of an indium telluride interfacial layer in the CdTe/InSb heterostructures. The stoichiometry of the CdTe/InSb heterostructures was observed by the Auger electron spectroscopy, and Auger depth profiles also demonstrated that the CdTe/InSb heterointerface was not abrupt. The results indicated that the films grown at about 265-degrees-C posed a significant problem due to interdiffusion from the InSb substrates during the growth.
引用
收藏
页码:1101 / 1103
页数:3
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