8-WAVELENGTH DBR LASER ARRAY FABRICATED WITH A SINGLE-STEP BRAGG GRATING PRINTING TECHNIQUE

被引:29
作者
VERDIELL, JM
KOCH, TL
TENNANT, DM
FEDER, K
GNALL, RP
YOUNG, MG
MILLER, BI
KOREN, U
NEWKIRK, MA
TELL, B
机构
[1] AT& T Bell Laboratories, Crawfords Corner Rd, Holmdel
关键词
Bragg cells - Diffraction gratings - Frequency division multiplexing - Photolithography - Printing - Semiconductor device manufacture;
D O I
10.1109/68.219688
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An 8-wavelength DBR array for narrow channel wavelength division multiplexing (WDM) has been fabricated with a new technique for printing first-order Bragg gratings using a phase mask and a conventional incoherent source. All the distributed gratings were printed in a single photolithographic step with a slightly modified mask aligner. We demonstrate excellent wavelength control for channels separated by as little as 0.8 nm. Many advanced photonic devices relying on gratings like quarter-wave shifted DFB lasers and WDM components can potentially be manufactured with this technique in a simple and cost-effective way.
引用
收藏
页码:619 / 621
页数:3
相关论文
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