ATOMICALLY RESOLVED SCANNING-TUNNELING-MICROSCOPY STUDY OF THE ADSORPTION AND DISSOCIATION OF METHYLCHLORIDE ON SI(001)

被引:44
作者
BRONIKOWSKI, MJ
HAMERS, RJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词
D O I
10.1116/1.579826
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:777 / 781
页数:5
相关论文
共 26 条
[1]   SCANNING TUNNELING MICROSCOPY STUDY OF THE ADSORPTION AND RECOMBINATIVE DESORPTION OF HYDROGEN FROM THE SI(100)-2X1 SURFACE [J].
BOLAND, JJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :2458-2464
[2]   MANIPULATING CHLORINE ATOM BONDING ON THE SI(100)-(2X1) SURFACE WITH THE STM [J].
BOLAND, JJ .
SCIENCE, 1993, 262 (5140) :1703-1706
[3]   EVIDENCE OF PAIRING AND ITS ROLE IN THE RECOMBINATIVE DESORPTION OF HYDROGEN FROM THE SI(100)-2X1 SURFACE [J].
BOLAND, JJ .
PHYSICAL REVIEW LETTERS, 1991, 67 (12) :1539-1542
[4]   ADSORPTION AND DISSOCIATION OF DISILANE ON SI(001) STUDIED BY STM [J].
BRONIKOWSKI, MJ ;
WANG, YJ ;
MCELLISTREM, MT ;
CHEN, D ;
HAMERS, RJ .
SURFACE SCIENCE, 1993, 298 (01) :50-62
[5]  
BRONIKOWSKI MJ, UNPUB SURF SCI
[6]   ATOMIC AND ELECTRONIC-STRUCTURES OF RECONSTRUCTED SI(100) SURFACES [J].
CHADI, DJ .
PHYSICAL REVIEW LETTERS, 1979, 43 (01) :43-47
[7]   HIGH-PERFORMANCE, LOW-NOISE DIGITAL CONTROLLER FOR INCHWORM PIEZOELECTRIC TRANSLATORS [J].
CHEN, X ;
COUSINS, B ;
MCELLISTREM, M ;
HAMERS, RJ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (10) :4308-4313
[8]   VIBRATIONAL STUDIES OF CH3I ON SI(100)-(2X1) - ADSORPTION AND DECOMPOSITION OF THE METHYL SPECIES [J].
COLAIANNI, ML ;
CHEN, PJ ;
GUTLEBEN, H ;
YATES, JT .
CHEMICAL PHYSICS LETTERS, 1992, 191 (06) :561-568
[9]   COMPARISON OF CL2 AND HCL ADSORPTION ON SI(100)-(2 X-1) [J].
GAO, Q ;
CHENG, CC ;
CHEN, PJ ;
CHOYKE, WJ ;
YATES, JT .
THIN SOLID FILMS, 1993, 225 (1-2) :140-144
[10]   CHLORINE BONDING SITES AND BONDING CONFIGURATIONS ON SI(100)-(2X1) [J].
GAO, Q ;
CHENG, CC ;
CHEN, PJ ;
CHOYKE, WJ ;
YATES, JT .
JOURNAL OF CHEMICAL PHYSICS, 1993, 98 (10) :8308-8323