THERMALLY DRIVEN PHASE-CHANGE MICROACTUATION

被引：47

作者：

BERGSTROM, PL ^{[1
]}

JI, J ^{[1
]}

LIU, YN ^{[1
]}

KAVIANY, M ^{[1
]}

WISE, KD ^{[1
]}

机构：

[1] UNIV MICHIGAN,DEPT MECH ENGN & APPL MECH,ANN ARBOR,MI 48109

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1995年 / 4卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/84.365365

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a microactuation scheme based on thermally driven liquid-vapor phase-change in a partially filled sealed cavity, A test structure for studying this system has been designed and fabricated, The cavity is 900 mu m by 900 mu m by 300 mu m in size with a thin, 600 mu m by 800 mu m grid-shaped heater located on the floor of the cavity and elevated approximately 8 mu m above it, The heater is composed of open diamond-shaped unit cells defined by 12-mu m-wide, 3-mu m-thick bulk-silicon beams, giving an overall electrical heater resistance of 3-10 Omega. Using methanol as the cavity fluid with partial filling, drive levels of 10 mW sustain a 13-Atm pressure rise within the cavity. Real-time measurements demonstrate a pressure response time on the order of 100 ms for an input power of 100 mW, Simulated pressure response calculations indicate the potential for an optimized response time on the order of 40 ms at this power level.

引用

页码：10 / 17

页数：8

共 24 条

[1] Terry S.C., Jerman J.H., Angell J.B., A gas chromatographic air analyzer fabricated on a silicon wafer, IEEE Trans. Electron Dev., 26, pp. 1880-1886, (1979)
[2] Esashi M., Shoji S., Nakano A., Normally-closed microvalve and micropump fabricated on a silicon wafer, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 29-34, (1989)
[3] Nakagawa S., Shoji S., Esashi M., A micro chemical analyzing system integrated on a silicon wafer, Proc. IEEE Micro Electra Mechanical Systems Workshop, pp. 89-94, (1990)
[4] Jacobsen S.C., Price R.H., Wood J.E., Rytting T.H., Rafaelof M., A design overview of an eccentric-motion electrostatic micromotor, Sensors and Actuators, 20, pp. 1-16, (1989)
[5] Tang W.C., Nguyen T.-C., Howe R.T., Laterally-driven polysilicon icon resonant microstructures, Sensors and Actuators, 20, pp. 25-32, (1989)
[6] Fan L.-S., Tai Y.-C., Muller R.S., IC-processed electrostatic micromotors, Sensors and Actuators, 20, pp. 41-47, (1989)
[7] Pisano A.P., Resonant-structure micromotors: Historical perspective and analysis, Sensors and Actuators, 20, pp. 83-89, (1989)
[8] Wagner B., Benecke W., Microfabricated actuator with moving permanent magnet, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 27-32, (1991)
[9] Yanagisawa K., Tago A., Ohkubo T., Kuwano H., Magnetic microactuator, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 120-124, (1991)
[10] Jerman J.H., Electrically-activated micromachined diaphragm valves, IEEE Solid-State Sensor and Actuator Workshop Dig., pp. 65-69, (1990)

← 1 2 3 →