INFLUENCE OF PLASMA EXTRACTION ON A CYLINDRICAL LOW-PRESSURE RF DISCHARGE - A PIC-MC STUDY

被引：5

作者：

KRIMKE, R

URBASSEK, HM

机构：

[1] Fachbereich Physik, Universität Kaiserslautern, Erwin-Schrödinger-Straße

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1995年 / 23卷 / 01期

关键词：

D O I：

10.1109/27.376567

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A model is presented for plasma extraction from a cylindrical RF discharge. Even though the extraction geometry is two-dimensional, the model proposed here allows to discuss extraction in a one-dimensional geometry. Specific results are obtained for a low-pressure RF discharge between cylindrical electrodes with a high asymmetry. These are calculated with the help of a PIC-MC computer simulation. The influence of extraction on the plasma characteristics, the ionization efficiency, and the influence of an axial magnetic field are calculated and discussed.

引用

页码：103 / 109

页数：7

共 8 条

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