THE ORIGIN OF REDUCED CHEMICAL EROSION OF GRAPHITE BASED MATERIALS INDUCED BY BORON DOPING

被引:30
作者
SCHENK, A [1 ]
WINTER, B [1 ]
LUTTERLOH, C [1 ]
BIENER, J [1 ]
SCHUBERT, UA [1 ]
KUPPERS, J [1 ]
机构
[1] BAYERO UNIV, D-95440 BAYREUTH, GERMANY
关键词
D O I
10.1016/0022-3115(94)00620-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effect of boron doping on the chemical bonding in ultrathin amorphous hydrogenated carbon (C:H) films was investigated with surface sensitive spectroscopies. Undoped C:H films contain about equal amounts of carbon atoms in sp(3) and sp(2) hybridization states. Boron doping suppresses the formation of sp(2) C centers, thereby reducing the films graphitic constituents. Therefore, with increasing boron concentration, film exhibit enhanced capacity for H as compared to undoped films. At heated films the fraction of chemical erosion species with respect to released molecular hydrogen is reduced in B doped films. Due to the specific C/H chemistry in sp(3) dominated networks, chemical erosion and hydrogen release of heated B doped films occurs at lower temperature and in a narrower temperature range than at undoped films. The results at the model films are in excellent agreement with those reported for bulk boronized graphites and explain at a microscopic level B doping effects on erosion.
引用
收藏
页码:767 / 770
页数:4
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