MEASUREMENT OF THE SURFACE-RESISTANCE OF YBA2CU3O7-X THIN-FILMS USING STRIPLINE RESONATORS

被引：99

作者：

OATES, DE

ANDERSON, AC

MANKIEWICH, PM

机构：

[1] Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, 02173, Massachusetts

[2] AT and T Bell Laboratories, Holmdel, 07733, New Jersey

来源：

JOURNAL OF SUPERCONDUCTIVITY | 1990年 / 3卷 / 03期

关键词：

r.f; measurements; Resonators; stripline; surface resistance; thin films;

D O I：

10.1007/BF00625265

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We review methods of measuring surface resistance (Rs) of thin films using stripline resonators, and present our measurements of the Rs of YBa2Cu3O7-x films as a function of frequency, temperature, and r.f. magnetic field. The films were deposited on LaAlO3 substrates by two methods: (1) electron-beam coevaporation of Y, BaF, and Cu followed by annealing in O2, and (2) single-target in situ sputtering. The measurements were obtained at frequencies from 0.4 to 10 GHz, temperatures from 4 to 90 K, and an r.f. magnetic field range from 0 to 30 Oe. At low temperature and low r.f. field at 0.4 GHz, the Rs values obtained for the two deposition methods are approximately 7×10-6 and 4×10-6 Ω, respectively. © 1990 Plenum Publishing Corporation.

引用

页码：251 / 259

页数：9

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