OXIDATION OF HAFNIUM CARBIDE IN THE TEMPERATURE-RANGE 1400-DEGREES TO 2060-DEGREES-C

被引:101
作者
BARGERON, CB
BENSON, RC
JETTE, AN
PHILLIPS, TE
机构
[1] Applied Physics Laboratory, John Hopkins University, Laurel, Maryland
关键词
D O I
10.1111/j.1151-2916.1993.tb05332.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
After hafnium carbide has been oxidized at temperatures in the range of 1400-degrees to 2060-degrees-C, three distinct layers are present in the film cross section: (a) a residual carbide layer with dissolved oxygen in the lattice, (b) a dense-appearing oxide interlayer containing carbon, and (c) a porous outer layer of hafnium oxide. Experimental measurements of layer thicknesses and oxygen concentrations are combined with an extended formulation of moving-boundary diffusion theory to obtain the diffusion constants of oxygen in each of the three layers. The results indicate that the oxide interlayer is a better diffusion barrier for oxygen than either of the other layers. Based on X-rav microanalysis, X-ray diffraction, and resistance measurements, the interlayer is an oxygen-deficient oxide of hafnium with a carbon impurity. The interlayer hardness equals that of the residual carbide layer.
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页码:1040 / 1046
页数:7
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