FAST TEMPERATURE-PROGRAMMED SENSING FOR MICRO-HOTPLATE GAS SENSORS

被引：88

作者：

CAVICCHI, RE ^{[1
]}

SUEHLE, JS ^{[1
]}

KREIDER, KG ^{[1
]}

GAITAN, M ^{[1
]}

CHAPARALA, P ^{[1
]}

机构：

[1] UNIV MARYLAND,RELIABIL ENGN PROGRAM,COLLEGE PK,MD 20742

来源：

IEEE ELECTRON DEVICE LETTERS | 1995年 / 16卷 / 06期

关键词：

D O I：

10.1109/55.790737

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe an operating mode of a gas sensor that greatly enhances the capability of the device to determine the composition of a sensed gas, The device consists of a micromachined hotplate with integrated heater, heat distribution plate, electrical contact pads, and sensing film, The temperature programmed sensing (TPS) technique uses millisecond timescale temperature changes to modify the rates for adsorption, desorption, and reaction of gases on the sensing surface during sensor operation, A repetitive train of temperature pulses produces a patterned conductance response that depends on the gas composition, as well as the temperature pulse width, amplitude, and specific sequence of pulses, Results are shown for the vapors of water, ethanol, methanol, formaldehyde, and acetone.

引用

页码：286 / 288

页数：3

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