MICROSTRUCTURE CONTROL FOR SPUTTER-DEPOSITED ZRO2, ZRO2.CAO AND ZRO2.Y2O3

被引：32

作者：

PAWLEWICZ, WT

HAYS, DD

机构：

来源：

THIN SOLID FILMS | 1982年 / 94卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90027-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：31 / 45

页数：15

共 8 条

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