CHARACTERISTICS OF TITANIUM ARC EVAPORATION PROCESSES

被引：89

作者：

MARTIN, PJ ^{[1
]}

MCKENZIE, DR ^{[1
]}

NETTERFIELD, RP ^{[1
]}

SWIFT, P ^{[1
]}

FILIPCZUK, SW ^{[1
]}

MULLER, KH ^{[1
]}

PACEY, CG ^{[1
]}

JAMES, B ^{[1
]}

机构：

[1] UNIV SYDNEY,SYDNEY,NSW 2006,AUSTRALIA

来源：

THIN SOLID FILMS | 1987年 / 153卷

关键词：

D O I：

10.1016/0040-6090(87)90173-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：91 / 102

页数：12

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