DEFECT-IMPURITY RELATIONSHIPS IN ELECTRON-DAMAGED SILICON

被引：24

作者：

CARTER, JR

机构：

来源：

关键词：

D O I：

10.1109/TNS.1996.4324342

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：24 / +

页数：1

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