SURFACE IMAGING OF III-V SEMICONDUCTORS BY REFLECTION ELECTRON-MICROSCOPY AND INNER POTENTIAL MEASUREMENTS

被引：31

作者：

YAMAMOTO, N

SPENCE, ICH

机构：

来源：

THIN SOLID FILMS | 1983年 / 104卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(83)90547-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：43 / 55

页数：13

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