STUDY ON GROWTH OF THIN-LAYERS USING OPTICAL AND ELECTRICAL MEASUREMENTS DURING THEIR DEPOSITION

被引:11
作者
GADENNE, P [1 ]
机构
[1] UNIV PARIS 06, OPT SOLIDES LAB, CNRS, EQUIPE RECH, F-75230 PARIS 05, FRANCE
关键词
D O I
10.1016/0040-6090(77)90372-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:369 / 381
页数:13
相关论文
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