NATURAL LITHOGRAPHY

被引：585

作者：

DECKMAN, HW

DUNSMUIR, JH

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 04期

关键词：

D O I：

10.1063/1.93501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：377 / 379

页数：3

共 8 条

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