CHARACTERIZATION OF ION-IMPLANTED SILICON - CORRELATION OF OPTICAL MEASUREMENTS WITH MICROSTRUCTURAL OBSERVATIONS

被引：7

作者：

DONLON, WT ^{[1
]}

JAMES, JV ^{[1
]}

BOMBACK, JL ^{[1
]}

HUO, CR ^{[1
]}

WANG, CC ^{[1
]}

机构：

[1] WAYNE STATE UNIV,DETROIT,MI 48202

来源：

ULTRAMICROSCOPY | 1987年 / 22卷 / 1-4期

关键词：

D O I：

10.1016/0304-3991(87)90074-X

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

19

引用

收藏

页码：305 / 317

页数：13

相关论文

共 19 条

[1] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV
ASPNES, DE
STUDNA, AA
[J]. PHYSICAL REVIEW B, 1983, 27 (02) : 985 - 1009
[2] BOMBACK JL, 1985, B AM PHYS SOC, V30, P614
[3] THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY
BRAVMAN, JC
SINCLAIR, R
[J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01): : 53 - 61
[4] CHU W, 1978, BACKSCATTERING SPECT, P13
[5] SYMMETRY ANALYSIS OF 2ND-HARMONIC GENERATION IN SILICON
DRISCOLL, TA
GUIDOTTI, D
[J]. PHYSICAL REVIEW B, 1983, 28 (02): : 1171 - 1173
[6] ELECTRON-ENERGY LOSS SPECTRA OF DIAMOND, GRAPHITE AND AMORPHOUS CARBON
EGERTON, RF
WHELAN, MJ
[J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 3 (03) : 232 - 236
[7] FELDMAN LC, 1982, MATERIALS ANAL ION C
[8] GENERATION OF OPTICAL HARMONICS
FRANKEN, PA
WEINREICH, G
PETERS, CW
HILL, AE
[J]. PHYSICAL REVIEW LETTERS, 1961, 7 (04) : 118 - &
[9] 2ND HARMONIC-GENERATION IN CENTRO-SYMMETRIC SEMICONDUCTORS
GUIDOTTI, D
DRISCOLL, TA
GERRITSEN, HJ
[J]. SOLID STATE COMMUNICATIONS, 1983, 46 (04) : 337 - 340
[10] STUDY OF SI(111) SURFACES BY OPTICAL 2ND-HARMONIC GENERATION - RECONSTRUCTION AND SURFACE PHASE-TRANSFORMATION
HEINZ, TF
LOY, MMT
THOMPSON, WA
[J]. PHYSICAL REVIEW LETTERS, 1985, 54 (01) : 63 - 66