THIN-FILM THICKNESS MEASUREMENTS WITH THERMAL WAVES

被引：107

作者：

ROSENCWAIG, A

OPSAL, J

WILLENBORG, DL

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 02期

关键词：

D O I：

10.1063/1.94267

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：166 / 168

页数：3

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