CHARACTERIZATION OF AMORPHOUS TUNGSTEN TRIOXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING METHOD

被引:33
作者
NANBA, T [1 ]
TAKAHASHI, T [1 ]
TAKADA, J [1 ]
OSAKA, A [1 ]
MIURA, Y [1 ]
YASUI, I [1 ]
KISHIMOTO, A [1 ]
KUDO, T [1 ]
机构
[1] UNIV TOKYO,INST IND SCI,MINATO KU,TOKYO 106,JAPAN
关键词
D O I
10.1016/0022-3093(94)90290-9
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Amorphous tungsten trioxide thin films were prepared using a rf magnetron sputtering method. The relation between structure and electrochromic properties was investigated, At the macroscopic level, the films had dense structures. From Raman spectroscopic and X-ray radial distribution analyses, it was deduced that the networks were basically formed by three-, four- and six-membered rings of corner-sharing WO6 octahedra, and in the films with low O/W atomic ratios many edge-sharing units were present. It was also found that the films with high O/W ratios showed good electrochromic properties, which were closely related to the six-membered rings,
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页码:233 / 237
页数:5
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