PRODUCTION OF SHAPE-MEMORY ALLOYS FOR MICROACTUATION

被引:8
作者
REYNAERTS, D
PEIRS, J
VANBRUSSEL, H
机构
[1] Div. Prod. Eng., Katholieke Univ., Leuven, Heverlee
关键词
D O I
10.1088/0960-1317/5/2/024
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports on the development of shape memory alloy based microactuators that can be integrated in teleoperated microsystems for medical applications. The use of shape memory alloys as actuator will increase the performance of micromechanical devices by several orders of magnitude. The paper presents the results of a material study and an analysis of the current technological limitations of shape memory alloys for application in micro actuators. The possibilities for using thin rolled wires, ground wires, and melt-spun ribbons in micro-applications are studied in particular. These could offer an attractive alternative to sputtered shape memory thin films.
引用
收藏
页码:150 / 152
页数:3
相关论文
共 9 条
[1]  
Donner P., 1990, MATER SCI FORUM, V56-58, P723
[2]  
Ikuta K., 1994, IEEE MICRO ELEC MECH, P355
[3]  
IKUTA K, CRYSTALLOGRAPHIC ANA, P38
[4]  
IKUTA K, 1988, IEEE C ROBOTICS AUTO, P427
[5]   Vacuum-deposited TiNi shape memory film. Characterization and applications in microdevices [J].
Johnson, A.David .
Journal of Micromechanics and Microengineering, 1991, 1 (01) :34-41
[6]  
KURIBAYASHI K, 1992, MATER RES SOC SYMP P, V276, P167, DOI 10.1557/PROC-276-167
[7]  
MIYAZAKI S, 1992, IN PRESS INT S MEAS
[8]  
REYNAERTS D, 1994, IN PRESS INT C SHAPE
[9]   THIN-FILM PROCESSING OF TINI SHAPE MEMORY ALLOY [J].
WALKER, JA ;
GABRIEL, KJ ;
MEHREGANY, M .
SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :243-246