A MICROPOSITIONING TOOL POST USING A PIEZOELECTRIC ACTUATOR FOR DIAMOND TURNING MACHINES

被引：112

作者：

OKAZAKI, Y

机构：

[1] Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, MITI

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1990年 / 12卷 / 03期

关键词：

diamond turning; micro-positioning; tool posts; PZT actuators; closed-loop servo systems; micro patterns; notch filters;

D O I：

10.1016/0141-6359(90)90087-F

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A micro-positioning tool post 'Piezo tool servo' has been developed for high-resolution tool servo systems for ultra-precision diamond turning machines. It was designed by using a wire-cut parallel spring mechanism, a PZT stack actuator and a capacitance gauge. To eliminate the non-linearities in the PZT actuator and to improve the stiffness and response, two types of closed-loop controller were applied to the tool post, and compared. Both controllers were effective in obtaining flat frequency characteristics, resolution, static stiffness and static stability. The actual resolution of depth-of-cut control was determined by a cutting test on an aluminium alloy. © 1990.

引用

页码：151 / 156

页数：6

共 5 条

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