COPPER OXIDE-LOADED TIN DIOXIDE THIN-FILM FOR DETECTION OF DILUTE HYDROGEN-SULFIDE

被引:32
作者
YOO, DJ [1 ]
TAMAKI, J [1 ]
PARK, SJ [1 ]
MIURA, N [1 ]
YAMAZOE, N [1 ]
机构
[1] SEOUL NATL UNIV,COLL ENGN,DEPT INORGAN MAT ENGN,SEOUL 151742,SOUTH KOREA
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1995年 / 34卷 / 4A期
关键词
CUO; SNO2; THIN FILM; H2S SENSOR; RESPONSE RATE; DIFFUSION;
D O I
10.1143/JJAP.34.L455
中图分类号
O59 [应用物理学];
学科分类号
摘要
The H2S sensing characteristics of SnO2 thin films loaded with CuO were found to be much improved by reducing the film thickness. A 40-nm-thick film showed sensitivity as high as 20000 and 2000 to 1.5 and 0.3 ppm H2S in air, respectively, at 200 degrees C, while the rate of response to 0.3 ppm H2S was rather slow.
引用
收藏
页码:L455 / L457
页数:3
相关论文
共 6 条
  • [1] H2S-SENSITIVE THIN-FILM FABRICATED FROM HYDROTHERMALLY SYNTHESIZED SNO2 SOL
    ANDO, M
    SUTO, S
    SUZUKI, T
    TSUCHIDA, T
    NAKAYAMA, C
    MIURA, N
    YAMAZOE, N
    [J]. JOURNAL OF MATERIALS CHEMISTRY, 1994, 4 (04) : 631 - 633
  • [2] RESPONSE OF SOME SNO2 GAS SENSORS TO H2S AFTER QUICK COOLING
    LANTTO, V
    ROMPPAINEN, P
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (10) : 2550 - 2556
  • [3] SENSING BEHAVIOR OF CUO-LOADED SNO2 ELEMENT FOR H2S DETECTION
    MAEKAWA, T
    TAMAKI, J
    MIURA, N
    YAMAZOE, N
    [J]. CHEMISTRY LETTERS, 1991, (04) : 575 - 578
  • [4] IMPROVEMENT OF COPPER OXIDE-TIN OXIDE SENSOR FOR DILUTE HYDROGEN-SULFIDE
    MAEKAWA, T
    TAMAKI, J
    MIURA, N
    YAMAZOE, N
    [J]. JOURNAL OF MATERIALS CHEMISTRY, 1994, 4 (08) : 1259 - 1262
  • [5] STABILITY, SENSITIVITY AND SELECTIVITY OF TUNGSTEN TRIOXIDE FILMS FOR SENSING APPLICATIONS
    SMITH, DJ
    VETELINO, JF
    FALCONER, RS
    WITTMAN, EL
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1993, 13 (1-3) : 264 - 268
  • [6] CUO-SNO2 ELEMENT FOR HIGHLY SENSITIVE AND SELECTIVE DETECTION OF H2S
    TAMAKI, J
    MAEKAWA, T
    MIURA, N
    YAMAZOE, N
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1992, 9 (03) : 197 - 203