EFFECT OF A MAGNETIC FILTER ON THE FORMATION AND DEPOSITION OF HIGH-Z IMPURITIES IN A MULTICUSP ION-SOURCE

被引：8

作者：

EHLERS, KW

LEUNG, KN

PINCOSY, PA

VELLA, MC

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 06期

关键词：

D O I：

10.1063/1.93573

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：517 / 519

页数：3

共 15 条

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