OPTICAL PROFILOMETER - A NEW METHOD FOR HIGH-SENSITIVITY AND WIDE DYNAMIC-RANGE

被引:58
作者
FAINMAN, Y [1 ]
LENZ, E [1 ]
SHAMIR, J [1 ]
机构
[1] TECHNION ISRAEL INST TECHNOL,DEPT MECH ENGN,HAIFA,ISRAEL
来源
APPLIED OPTICS | 1982年 / 21卷 / 17期
关键词
D O I
10.1364/AO.21.003200
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:3200 / 3208
页数:9
相关论文
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