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OPTICAL LITHOGRAPHY
被引:143
作者
:
DILL, FH
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
DILL, FH
[
1
]
机构
:
[1]
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
来源
:
IEEE TRANSACTIONS ON ELECTRON DEVICES
|
1975年
/ ED22卷
/ 07期
关键词
:
D O I
:
10.1109/T-ED.1975.18158
中图分类号
:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号
:
0808 ;
0809 ;
摘要
:
引用
收藏
页码:440 / 444
页数:5
相关论文
共 6 条
[1]
HERRIOTT DR, 1974, IEDM TECH DIG DEC, P21
[2]
PROJECTION MASKING, THIN PHOTORESIST LAYERS AND INTERFERENCE EFFECTS
MIDDELHOEK, S
论文数:
0
引用数:
0
h-index:
0
MIDDELHOEK, S
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1970,
14
(02)
: 117
-
+
[3]
NEUREUTHER AR, 1974, 18 P MICR RES I S NE
[4]
SCHEUTZE JH, 1966, SOLID STATE TECHNOL, V9, P31
[5]
OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES
SHANK, CV
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
SHANK, CV
SCHMIDT, RV
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
SCHMIDT, RV
[J].
APPLIED PHYSICS LETTERS,
1973,
23
(03)
: 154
-
155
[6]
FABRICATION TECHNIQUES FOR SURFACE-ACOUSTIC-WAVE AND THIN-FILM OPTICAL DEVICES
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, LINCOLN LAB, LEXINGTON, MA 02173 USA
MIT, LINCOLN LAB, LEXINGTON, MA 02173 USA
SMITH, HI
[J].
PROCEEDINGS OF THE IEEE,
1974,
62
(10)
: 1361
-
1387
←
1
→
共 6 条
[1]
HERRIOTT DR, 1974, IEDM TECH DIG DEC, P21
[2]
PROJECTION MASKING, THIN PHOTORESIST LAYERS AND INTERFERENCE EFFECTS
MIDDELHOEK, S
论文数:
0
引用数:
0
h-index:
0
MIDDELHOEK, S
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1970,
14
(02)
: 117
-
+
[3]
NEUREUTHER AR, 1974, 18 P MICR RES I S NE
[4]
SCHEUTZE JH, 1966, SOLID STATE TECHNOL, V9, P31
[5]
OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES
SHANK, CV
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
SHANK, CV
SCHMIDT, RV
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
BELL TEL LABS INC, HOLMDEL, NJ 07733 USA
SCHMIDT, RV
[J].
APPLIED PHYSICS LETTERS,
1973,
23
(03)
: 154
-
155
[6]
FABRICATION TECHNIQUES FOR SURFACE-ACOUSTIC-WAVE AND THIN-FILM OPTICAL DEVICES
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, LINCOLN LAB, LEXINGTON, MA 02173 USA
MIT, LINCOLN LAB, LEXINGTON, MA 02173 USA
SMITH, HI
[J].
PROCEEDINGS OF THE IEEE,
1974,
62
(10)
: 1361
-
1387
←
1
→