OPTICAL LITHOGRAPHY

[1] HERRIOTT DR, 1974, IEDM TECH DIG DEC, P21

[2] PROJECTION MASKING, THIN PHOTORESIST LAYERS AND INTERFERENCE EFFECTS [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (02) : 117 - +

[3] NEUREUTHER AR, 1974, 18 P MICR RES I S NE

[4] SCHEUTZE JH, 1966, SOLID STATE TECHNOL, V9, P31

[5] OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES [J]. APPLIED PHYSICS LETTERS, 1973, 23 (03) : 154 - 155

[6] FABRICATION TECHNIQUES FOR SURFACE-ACOUSTIC-WAVE AND THIN-FILM OPTICAL DEVICES [J]. PROCEEDINGS OF THE IEEE, 1974, 62 (10) : 1361 - 1387

[1] HERRIOTT DR, 1974, IEDM TECH DIG DEC, P21

[2] PROJECTION MASKING, THIN PHOTORESIST LAYERS AND INTERFERENCE EFFECTS [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (02) : 117 - +

[3] NEUREUTHER AR, 1974, 18 P MICR RES I S NE

[4] SCHEUTZE JH, 1966, SOLID STATE TECHNOL, V9, P31

[5] OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES [J]. APPLIED PHYSICS LETTERS, 1973, 23 (03) : 154 - 155

[6] FABRICATION TECHNIQUES FOR SURFACE-ACOUSTIC-WAVE AND THIN-FILM OPTICAL DEVICES [J]. PROCEEDINGS OF THE IEEE, 1974, 62 (10) : 1361 - 1387