EXCIMER LASER-INDUCED SPUTTERING OF YBA2CU3O7-X

被引:13
作者
SUDARSAN, U [1 ]
CODY, NW [1 ]
BOZACK, MJ [1 ]
SOLANKI, R [1 ]
机构
[1] OREGON GRAD CTR,DEPT APPL PHYS & ELECT ENGN,BEAVERTON,OR 97006
关键词
D O I
10.1557/JMR.1988.0825
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:825 / 829
页数:5
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