A LINE EXTRACTION METHOD FOR AUTOMATED SEM INSPECTION OF VLSI RESIST

被引：19

作者：

SHU, DB

LI, CC

MANCUSO, JF

SUN, YN

机构：

[1] UNIV PITTSBURGH,DEPT ELECT ENGN,PITTSBURGH,PA 15261

[2] WESTINGHOUSE RES & DEV CTR,DIV MAT SCI,PITTSBURGH,PA 15235

来源：

关键词：

D O I：

10.1109/34.3875

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

引用

页码：117 / 120

页数：4

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