ELASTIC CHARACTERISTICS OF DIAMOND-LIKE CARBON COATINGS

被引:6
作者
STRELNITSKIJ, VE [1 ]
GALANOV, BA [1 ]
GRIGOREV, ON [1 ]
TREFILOV, VI [1 ]
机构
[1] KIEV MAT SCI PROBLEMS INST,KIEV,UKRAINE
关键词
D O I
10.1016/0925-9635(93)90241-S
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Methods have been developed to determine the elasticity modulus E of coatings by the use of diagrams of pyramidal indenter penetration. The elasticity modulus was measured for diamond-like carbon (DLC) films produced by vacuum arc deposition of carbon plasma fluxes, separated from macroparticles and neutral atoms, onto copper substrates. It is shown that high density (rho = 3.4 g cm-3) DLC films have Young's modulus E = 900 +/- 10 GPa. When the experimental accuracy is taken into account, this value is almost coincident with Young's modulus for diamond. As the density decreases to 2.4 g cm-3, the E value decreases to 500-600 GPa, corresponding to a value intermediate between Young's moduli for diamond and graphite.
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页码:869 / 872
页数:4
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