PREPARATION OF AMORPHOUS IRON-CONTAINING AND CRYSTALLINE IRON-OXIDE FILMS BY GLOW-DISCHARGE AND THEIR PROPERTIES

Reflective, pinhole-free, iron-containing films were obtained by introducing iron pentacarbonyl vapors, Fe(CO)5, into an inductively coupled r.f. glow discharge reactor. The films were amorphous with a particle size less than 0.1 μm based on the results of X-ray diffraction patterns and scanning electron micrographs. The chemical, electrical, and structural properties of these films depend upon the temperature of the deposition. The films exhibit the α-Fe phase after being annealed. The adhesive strength between the films and the aluminum substrates normally exceeds 4000 lbf in-2. Fe3O4 films with a preferred orientation (400) were successfully prepared by introducing either oxygen or carbon dioxide with iron pentacarbonyl into the glow discharge reactor at temperatures above 200°C. The influence of the CO2 flow rate on the compositions of the Fe3O4 films was studied as was the relationship between composition and sheet conductivities. © 1990.