DIAMOND CRYSTALLITE FORMATION ON SI(100) FROM THE GAS-PHASE - SEEDING OR HETEROGENEOUS NUCLEATION

被引：21

作者：

MOLINARI, E

POLINI, R

TOMELLINI, M

机构：

[1] Dipartimento di Scienze e Tecnologie Chimiche, Universita' di Roma Tor Vergata, 00173 Roma, Via O. Raimondo

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 11期

关键词：

D O I：

10.1063/1.107567

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Well separated particles of diamond have been obtained on Si(100) surface by the hot filament chemical vapor deposition technique after scratching by diamond paste. Consecutive depositions, one at a higher and one at lower temperature, or at different CH4 contents of the gas mixture, together with a kinetic analysis based on the particle size distribution function, allow one to decide about the relative importance of heterogeneous nucleation and of seeding.

引用

页码：1287 / 1289

页数：3

共 11 条

[1]

ASCARELLI P, 1991, P NATO ASI DIAMOND D

[2] NUCLEATION OF DIAMOND ON SILICON, SIALON, AND GRAPHITE SUBSTRATES COATED WITH AN A-C-H LAYER [J].

DUBRAY, JJ ;

PANTANO, CG ;

MELONCELLI, M ;

BERTRAN, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (06) :3012-3018

[3] MECHANISM FOR DIAMOND GROWTH FROM METHYL RADICALS [J].

HARRIS, SJ .

APPLIED PHYSICS LETTERS, 1990, 56 (23) :2298-2300

[4] GROWTH OF DIAMOND PARTICLES IN CHEMICAL VAPOR-DEPOSITION [J].

IIJIMA, S ;

AIKAWA, Y ;

BABA, K .

JOURNAL OF MATERIALS RESEARCH, 1991, 6 (07) :1491-1497

[5]

LUX B, 1991, P NATO ASI DIAMOND D

[6] UNCOUPLING CRYSTAL-GROWTH AND NUCLEATION IN THE DEPOSITION OF DIAMOND FROM THE GAS-PHASE [J].

MOLINARI, E ;

POLINI, R ;

TERRANOVA, ML ;

ASCARELLI, P ;

FONTANA, S .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (07) :1778-1787

[7] NEAR-INTERFACE CHARACTERIZATION OF DIAMOND FILMS ON SILICA AND SILICON [J].

PICKRELL, DJ ;

ZHU, W ;

BADZIAN, AR ;

NEWNHAM, RE ;

MESSIER, R .

JOURNAL OF MATERIALS RESEARCH, 1991, 6 (06) :1264-1277

[8] DIRECT DEPOSITION OF POLYCRYSTALLINE DIAMOND FILMS ON SI(100) WITHOUT SURFACE PRETREATMENT [J].

RUDDER, RA ;

HUDSON, GC ;

POSTHILL, JB ;

THOMAS, RE ;

MARKUNAS, RJ .

APPLIED PHYSICS LETTERS, 1991, 59 (07) :791-793

[9] A MODEL KINETICS FOR NUCLEATION AT A SOLID-SURFACE WITH APPLICATION TO DIAMOND DEPOSITION FROM THE GAS-PHASE [J].

TOMELLINI, M ;

POLINI, R ;

SESSA, V .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (12) :7573-7578

[10]

WILD C, 1991, 1991 P APPL DIAM C, P197

← 1 2 →