DESIGN OF ASYNCHRONOUS DIELECTRIC MICROMOTORS

被引:15
作者
HAGEDORN, R
FUHR, G
MULLER, T
SCHNELLE, T
SCHNAKENBERG, U
WAGNER, B
机构
[1] Humboldt - University of Berlin, Department of Biology, 10115 Berlin
[2] Fraunhofer - Institute for Silicon Technology ISiT, 14199 Berlin
关键词
D O I
10.1016/0304-3886(94)90052-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper compares asynchronously and synchronously driven dielectric micromotors. The following advantages of an asynchronous motor are discussed. (i) Flexibility of the micromotor geometry. (ii) Simple design which allows for operation of rotors in electrolyte solutions (e.g. water) that may be pumped in this way. (iii) Opportunity to use negative dielectrophoretic forces to stabilise the rotors. To predict some properties of dielectric motors we have modelled their rotors geometrically as ellipsoids. This model is consistent with the experimental results and shows that motor operation is a complex function of geometry, driving frequency and material properties. Although the general motor characteristics (torque's) of asynchronously and synchronously driven motors are quite similar both motor types are sufficiently different in detail. Therefore, it is worth to design motors using special properties of the asynchronous principle.
引用
收藏
页码:159 / 185
页数:27
相关论文
共 45 条
[1]  
Lee, Ljung, Pisano, Polysilicon micro vibromotors, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 177-182, (1992)
[2]  
Udayakumar, Bart, Flynn, Chen, Tavrow, Cross, Brooks, Ehrlich, Ferroelectric thin film ultrasonic micromotors, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 109-113, (1991)
[3]  
Wagner, Benecke, Microfabricated actuator with moving permanent magnet, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 27-32, (1991)
[4]  
Wagner, Kreuzer, Benecke, Linear and rotational magnetic micromotors fabricated using silicon technology, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 183-189, (1992)
[5]  
Guckel, Christenson, Skrobis, Jung, Klein, Hartojo, Widjaja, A first functional current excited planar rotational magnetic micromotor, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 7-11, (1993)
[6]  
Ahn, Kim, Allen, A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 1-6, (1993)
[7]  
Tai, Fan, Muller, IC-processed micromotors, design, technology, and testing, 1989 IEEE Int. Micro Electro Mechanical Systems Workshop, pp. 1-16, (1989)
[8]  
Jacobsen, Price, Wood, Rytting, Rafaelof, A design overview of an eccentric-motion electrostatic microactuator (the wobble motor), Sensors Actuators, 20, pp. 1-16, (1989)
[9]  
Mehregany, Bart, Tavrow, Lang, Senturia, Principles in design and microfabrication of variable-capacitance side-drive motors, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 8, 4, pp. 3614-3624, (1990)
[10]  
Tai, Muller, IC-processed electrostatic synchronous micromotors, Sensors Actuators, 20, pp. 49-55, (1989)