CONNECTIONS AND DISCONNECTIONS ON INTEGRATED-CIRCUITS USING NANOSECOND LASER PULSES

被引:17
作者
COOK, PW [1 ]
SCHUSTER, SE [1 ]
GUTFELD, RJV [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.88070
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:124 / 126
页数:3
相关论文
共 5 条
[1]   EFFECTS OF PULSED LASER RADIATION ON THIN ALUMINUM FILMS [J].
ABOELFOTOH, MO ;
VONGUTFE.RJ .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (09) :3789-+
[2]   HIGH-INTENSITY LASER-INDUCED VAPORIZATION AND EXPLOSION OF SOLID MATERIAL [J].
DABBY, FW ;
PAEK, U .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1972, QE 8 (02) :106-&
[3]  
KUHN LP, UNPUBLISHED
[4]  
LANKARD JR, 1969, IEEE J QUANTUM ELECT, VQE 5, P626
[5]  
Smith R. A., 1959, SEMICONDUCTORS