HIGH-SENSITIVITY ACCELEROMETER USING MULTILAYER PIEZOELECTRIC CERAMICS

被引：5

作者：

OHTSUKI, Y

FUDA, Y

YOSHIDA, T

机构：

[1] TOKIN Corporation, Sendai, Miyagi, 982, Kouriyama, Taihaku-ku

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期

关键词：

ACCELEROMETER; MULTILAYER PIEZOELECTRIC CERAMICS; PYROELECTRIC EFFECT; PYROELECTRIC VOLTAGE; INTERNAL ELECTRODES; CANCELING CIRCUIT;

D O I：

10.1143/JJAP.32.4209

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A high sensitivity accelerometer using multilayer piezoelectric ceramics including internal electrodes has been developed. The sensitivity of this accelerometer is about 900 pC/G at the frequency range from 0.01 to 10 Hz. Because the circuit was structed to cancel pyroelectric voltages, the output voltage changes of this accelerometer were decreased to 1/10 compared with the case of a noncanceling circuit.

引用

页码：4209 / 4211

页数：3