A STUDY BY IN-SITU FTIR SPECTROSCOPY OF THE DECOMPOSITION OF PRECURSORS FOR THE MOCVD OF HIGH-TEMPERATURE SUPERCONDUCTORS

被引:20
作者
KOVALGIN, AY [1 ]
CHABERTROCABOIS, F [1 ]
HITCHMAN, ML [1 ]
SHAMLIAN, SH [1 ]
ALEXANDROV, SE [1 ]
机构
[1] ST PETERSBURG STATE TECH UNIV,DEPT ELECTR MAT TECHNOL,ST PETERSBURG 195251,RUSSIA
来源
JOURNAL DE PHYSIQUE IV | 1995年 / 5卷 / C5期
关键词
D O I
10.1051/jphyscol:1995542
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
In this paper we report on a study by FTIR spectroscopy of the gas phase thermal decomposition of [Y(TMHD)(3)], [Cu(TMHD)(2)] and [Ba(TDFND)(2).tetraglyme] under a total pressure of 10 Torr, for a temperature range 200 - 650 degrees C, and in the absence and presence of oxygen. The variation of the decomposition characteristics for each of the complexes as a function of temperature, and as shown by changes in the absorption coefficients, are related to the molecular structures.
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页码:357 / 364
页数:8
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