DIFFUSION MECHANISMS IN PD-AU THIN-FILM SYSTEM AND CORRELATION OF RESISTIVITY CHANGES WITH AUGER-ELECTRON SPECTROSCOPY AND RUTHERFORD BACKSCATTERING PROFILES

被引：103

作者：

HALL, PM

MORABITO, JM

POATE, JM

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

[2] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1016/0040-6090(76)90592-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 134

页数：28

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